Progress of vaccum deposition techniques for Si:H thin films structures

Stuchlík, J., Píč, V., Stuchlíková, T.-H., Purkrt, A., Remeš, Z. Progress of vaccum deposition techniques for Si:H thin films structures. In: KOŽÍŠEK, Z., KRÁL, R., ZEMENOVÁ, P., eds. Development of Materials Science in Research and Education. Book of Abstracts of the 26th Joint Seminar. Praha: Institute of Physics of the Czech Academy of Sciences, v. v. i., 2016, s. 43. ISBN 978-80-905962-4-5.