Ultra-fast three dimensional microanalysis using the scanning electron microscope equipped with xenon plasma focused ion beam

Dluhoš, J., Petrenec, M., Peřina, P., Reinauer, F., Kopeček, J., Hrnčíř, T., Jiruše, J. Ultra-fast three dimensional microanalysis using the scanning electron microscope equipped with xenon plasma focused ion beam. In: HOZÁK, P., ed. Proceedings of 18th International Microscopy Congress. Prague: Czechoslovak Microscopy Society, 2014. ISBN 978-80-260-6721-4.