Ultra-fast three dimensional microanalysis using the scanning electron microscope equipped with xenon plasma focused ion beam

0432741 - FZÚ 2015 eng A - Abstrakt
Dluhoš, J. - Petrenec, M. - Peřina, P. - Reinauer, F. - Kopeček, Jaromír - Hrnčíř, T. - Jiruše, J.
Ultra-fast three dimensional microanalysis using the scanning electron microscope equipped with xenon plasma focused ion beam.
Proceedings of 18th International Microscopy Congress. Prague: Czechoslovak Microscopy Society, 2014 - (Hozák, P.). ISBN 978-80-260-6721-4.
[International Microscopy Congress /18./. 07.09.2014-12.09.2014, Prague]
Institucionální podpora: RVO:68378271
Klíčová slova: SEM * FIB * xenon
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

The three dimensional microanalysis became a widely accepted analytical method during the past few years, gaining from the ability to describe the materials structure and composition as it exists in real components. A high resolution scanning electron microscope (SEM) combined with a focused ion beam (FIB) is used for a high precision tomographical method based on FIB slicing and SEM observation of the slice. The FIB-SEM can be further equipped by analytical methods like energy-dispersive X-ray spectrometer (EDS) for elemental composition or electron backscattered diffraction analyzer (EBSD) for crystal orientation mapping, resulting in 3D microanalysis, i.e. 3D EDS and 3D EBSD.
Trvalý link: http://hdl.handle.net/11104/0237116