Počet záznamů: 1
Mechanism of the film composition formation during magnetron sputtering of WTi
- 1.SHAGINYAN, L. R., MIŠINA, M., KADLEC, S., JASTRABÍK, L., MACKOVÁ, Anna, PEŘINA, Vratislav. Mechanism of the film composition formation during magnetron sputtering of WTi. Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. 2001, 19(5), 2554-2566. ISSN 0734-2101. E-ISSN 1520-8559.
Počet záznamů: 1