Vlček, J. - Potocký, T. - Čížek, J. - Houska, J. - Kormunda, M. - Zeman, Pavel - Peřina, Vratislav - Zemek, J. - Setsuhara, Y.
Reactive magnetron sputtering of hard Si-B-C-N films with a high-temperature oxidation resistance.
Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. Roč. 23, č. 6 (2005), s. 1513-1522. ISSN 0734-2101. E-ISSN 1520-8559
Impact factor: 1.399, year: 2005
http://hdl.handle.net/11104/0119346