Počet záznamů: 1
Structural and optical properties of Gd implanted GaN with various crystallographic orientations
0479677 - UJF-V 2018 RIV CH eng J - Článek v odborném periodiku
Macková, Anna - Malinský, Petr - Jagerová, Adéla - Sofer, Z. - Klímová, K. - Sedmidubský, D. - Pristovsek, M. - Mikulics, M. - Lorinčík, Jan - Bottger, R. - Akhmadaliev, S.
Structural and optical properties of Gd implanted GaN with various crystallographic orientations.
Thin Solid Films. Roč. 638, SEP (2017), s. 63-72 ISSN 0040-6090
Grant CEP: GA ČR GA13-20507S; GA ČR GA15-01602S; GA MŠk LM2015056
Institucionální podpora: RVO:67985882 ; RVO:61389005
Klíčová slova: GaN implantation * RBS channelling * optical properties of Gd implanted GaN
Kód oboru RIV: BG - Jaderná, atomová a mol. fyzika, urychlovače; BH - Optika, masery a lasery (URE-Y)
Impakt faktor: 1.879, rok: 2016
Structure, morphology, and optical properties of Gd implanted GaN epitaxial layers were studied for (0001), (11-20), and (11-22) orientations. The GaN layers grown by MOVPE on sapphire were subsequently implanted with 200 keV Gd+ ions using fluences of 5 x 10(15) and 5 x 10(16) cm(-2). Dopant depth profiling was accomplished by Rutherford Back-Scattering spectrometry (RBS). Structural and optical changes during subsequent annealing were characterized by RBS, Raman spectroscopy, and photoluminescence measurements. Post-implantation annealing induced a structural reorganization of GaN structure in the buried layer depending on the introduced disorder level, i.e. depending on the implantation fluence and on crystallographic orientation. The defect density depth distribution was evaluated by RBS. The surface morphology and optical properties depend on particular crystallographic orientation.
Trvalý link: http://hdl.handle.net/11104/0275642