Green Light Interferometry for Metrological SPM Positioning

0371198 - ÚPT 2012 FR eng C - Konferenční příspěvek (zahraniční konf.)
Lazar, Josef - Klapetek, P. - Číp, Ondřej - Čížek, Martin - Hrabina, Jan - Šerý, Mojmír
Green Light Interferometry for Metrological SPM Positioning.
Workshop on Metrological Atomic Force Microscope Instrumentation. Paris: LNE, 2011, s. 143.
[Workshop on Metrological Atomic Force Microscope Instrumentation. Trappes (FR), 07.02.2011-09.02.2011]
Grant CEP: GA ČR GA102/09/1276; GA ČR GA102/07/1179; GA AV ČR KAN311610701
Výzkumný záměr: CEZ:AV0Z20650511
Klíčová slova: green light interferometry * scanning probe microscopy * nanometrology
Kód oboru RIV: BH - Optika, masery a lasery

We present an arrangement for dimenstonal metrology of nanostructures based on various techniques of scanning probe microscopy (SPM) combined with a precision positioning of a sample. The system was developed to operate at and in cooperation with the Czech metrology Institute for calibration purposes and nanometrology. Traceabillty of the position monitoring and control of the scanning stage is ensured by full six axes interferometric displacement measurements. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine.
Trvalý link: http://hdl.handle.net/11104/0204775