Počet záznamů: 1
Investigation of the mechanical properties of thin films by bulge test
- 1.0353858 - ÚFM 2011 RIV CH eng J - Článek v odborném periodiku
Hémel, A. - Jacques, A. - Schenk, T. - Kruml, Tomáš
Investigation of the mechanical properties of thin films by bulge test.
Solid State Phenomena. 156-158, - (2010), s. 477-482. ISSN 1012-0394.
[GADEST 2009. Berlin, 26.09.2009-2.10.2009]
Výzkumný záměr: CEZ:AV0Z20410507
Klíčová slova: thin films * mechanical properties * bulge test
Kód oboru RIV: JJ - Ostatní materiály
A new bulge test device has been built, with the aim to perform mechanical tests on membranes with a thickness in the 100 nm to 10 µm range, between room temperature and 900°C. The first tests on Si3N4 and gold films give results consistent with literature data.
Trvalý link: http://hdl.handle.net/11104/0192987
Počet záznamů: 1