Počet záznamů: 1
Education and research at clean room laboratory for silicon device technology at Masaryk University
- 1.0352972 - ÚPT 2011 PL eng A - Abstrakt
Mikulík, P. - Humlíček, J. - Kulha, P. - Hovorka, Miloš - Kadlec, Filip
Education and research at clean room laboratory for silicon device technology at Masaryk University.
XXXIX "Jaszowiec" International School and Conference on the Physics of Semiconductors. Warsaw: University of Warsaw, 2010. s. 242.
["Jaszowiec" International School and Conference on the Physics of Semiconductors /39./. 19.06.2010-24.06.2010, Krynica Zdroj]
Výzkumný záměr: CEZ:AV0Z20650511; CEZ:AV0Z10100520
Klíčová slova: silicon * clean room * microelectronics laboratory
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
We present education and research at university clean room microelectronics laboratory for silicon device technology opened at Masaryk University Brno.
Trvalý link: http://hdl.handle.net/11104/0192336
Počet záznamů: 1