Počet záznamů: 1  

Scanning Electron Microscopy of Nonconductive Specimens at Critical Energies in a Cathode Lens System

  1. 1. 0205377 - UPT-D 20010016 RIV US eng J - Článek v odborném periodiku
    Frank, Luděk - Zadražil, Martin - Müllerová, Ilona
    Scanning Electron Microscopy of Nonconductive Specimens at Critical Energies in a Cathode Lens System.
    Scanning. Roč. 23, č. 1 (2001), s. 36-50. ISSN 0161-0457
    Grant CEP: GA ČR GA202/96/0961; GA ČR GA202/99/0008
    Výzkumný záměr: CEZ:AV0Z2065902
    Klíčová slova: scanning electron microscopy * specimen charging * nonconductive specimens
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
    Impakt faktor: 0.389, rok: 2001

    A method for scanning electron microscopy imaging of nonconductive specimens, based on measurement and utilisation of a critical energy, is described in detail together with examples of its application. The critical energy, at which the total electron yield curve crosses the unit level, is estimated on the basis of measurement of the image signal development from the beginning of irradiation. This approach, concentrated onto the detected signal as the only quantity crucial for the given purpose of acquiring a noncharged micrograph, evades consequences of any changes in an irradiated specimen that influence the total electron yield curve and possibly also the critical energy value. Implementation of the automated method, realised using a cathode lens-equipped scanning electron microsope (SEM), enables one to establish a mean rate of charging over the field of view and its dependence on the electron landing energy. This dependence enables one to determine the energy of a minimum damage of the image of the given field of view. Factors influencing reliability and applicability of the method are discussed and examples of noncharged micrographs of specimens from both life and material science fields are presented.
    Trvalý link: http://hdl.handle.net/11104/0100991