Počet záznamů: 1  

Xenon capillary discharge as a source of soft X-ray

  1. 1. 0179037 - UFP-V 20020054 RIV CZ eng J - Článek v odborném periodiku
    Vrba, Pavel - Vrbová, M.
    Xenon capillary discharge as a source of soft X-ray.
    Czechoslovak Journal of Physics. Roč. 52, supplement D (2002), s. 112-116 ISSN 0011-4626.
    [Symposium on Plasma Physics and Technology/20th./. Prague, 10.06.2002-13.06.2002]
    Výzkumný záměr: CEZ:AV0Z2043910
    Klíčová slova: capillary discharge, soft X-ray
    Kód oboru RIV: BL - Fyzika plazmatu a výboje v plynech
    Impakt faktor: 0.311, rok: 2002

    A novel type of capillary discharge device was demonstrated to obtain soft X-ray emission compplying with the demand for the future micro lithography[1].Experiments with the Xenon filled capillary lead to generation of incoherent radiation in the spectral region (13ö14)nm.We have done a theoretical analysis of the experiment based on previous work[2].
    Trvalý link: http://hdl.handle.net/11104/0001641