0134093 - FZU-D 20020382 RIV SK eng J - Journal Article
Bartoněk, L. - Keprt, Jiří
Computerized evaluation optical measuring thin films by the help of Michelson`s interferometer.
Materiálové inžinierstvo - Materials Engineering. Roč. 9, č. 2 (2002), s. 27-34. ISSN 1335-0803
R&D Projects: GA MŠMT LN00A015
Institutional research plan: CEZ:AV0Z1010921
Keywords : Michelson`s interferometer * computerized evaluation
Subject RIV: BH - Optics, Masers, Lasers

The interferometric measurement method of a thin film optical thickness is presented in this report. This measurement is realized by Michelson`s interferometer. Interferogram of a measured sample with one half of the surface covered by a layer is digitally recorded from thr screen by CCD camera.
Permanent Link: http://hdl.handle.net/11104/0032030