Počet záznamů: 1
Energy-resolved mass spectrometry and Monte Carlo simulation of atomic transport in magnetron sputtering
- 1.0132085 - FZU-D 980339 RIV CH eng J - Článek v odborném periodiku
Kadlec, Stanislav - Quaeyhaegens, C. - Knuyt, G. - Stals, L. M.
Energy-resolved mass spectrometry and Monte Carlo simulation of atomic transport in magnetron sputtering.
Surface and Coatings Technology. Roč. 97, - (1997), s. 633-641. ISSN 0257-8972. E-ISSN 1879-3347
Impakt faktor: 0.892, rok: 1997
Trvalý link: http://hdl.handle.net/11104/0030123
Počet záznamů: 1