RBS and XPS study of TiOx layers prepared by the PVD technique .

0105673 - UJF-V 20043247 RIV GB eng J - Článek v odborném periodiku
Macková, Anna - Peřina, Vratislav - Krumeich, J. - Zemek, J. - Kolouch, A.
RBS and XPS study of TiOx layers prepared by the PVD technique .
[Studium vrstech TiOx připravených technikou PVD metodami RBS a XPS.]
Surface and Interface Analysis. Roč. 36, č. 8 (2004), s. 1171-1173. ISSN 0142-2421. E-ISSN 1096-9918
Grant CEP: GA ČR GP102/01/D069
Výzkumný záměr: CEZ:AV0Z1048901
Klíčová slova: RBS * ERDA * TiOx
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Impakt faktor: 1.209, rok: 2004

The PVD coatings were prepared using Sulzer Innotec's closed magnetic field unbalanced magnetron sputtering facility. The deposition parameters of bias and oxygen flow rate were varied. The prepared samples were analysed by RBS (Rutherford backscattering spectrometry) to determine the Ti/O ratios and the thicknesses of the coatings, and by ERDA (elastic recoil detection analysis) to investigate the hydrogen content in the surface layer. XPS was used to characterize the near-surface composition and chemical bonding. Measurements of mechanical properties (hardness and thickness) were performed. We concluded from RBS analysis that Ti content is enhanced according to the increased bias and the decreased oxygen flow rate. We observed the increasing hardness in the case of the higher Ti content layers prepared. We found that a contaminated surface layer exists in which hydrogen, oxygen and carbon are incorporated.

Metodou RBS byly určeny poměry Ti/0 a tloušťka povlaků. Metodou ERDA byl vyšetřován obsah vodíku v povrchové vrstvě. Metodou XPS bylo charakterizováno složení v blízkosti povrchu a chemické vazby.
Trvalý link: http://hdl.handle.net/11104/0012899