Počet záznamů: 1

Detection of Secondary Electrons by Scintillation Detector at VP SEM

  1. 1.
    0368932 - UPT-D 2012 RIV US eng J - Článek v odborném periodiku
    Jirák, J. - Čudek, P. - Neděla, Vilém
    Detection of Secondary Electrons by Scintillation Detector at VP SEM.
    Microscopy and Microanalysis. Roč. 17, Suppl. 2 (2011), s. 922-923 ISSN 1431-9276
    Grant CEP: GA ČR GAP102/10/1410
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: variable pressure scanning electron microscopes (VP-SEM) * scintillation detector * secondary electrons
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
    Impakt faktor: 3.007, rok: 2011

    For specimen observation in the scanning electron microscope operating at a higher pressure of gases in the specimen chamber (VP SEM) ionization and scintillation detectors are commonly used. The ionization detector detects a mixture of signals of secondary and backscattered electrons. Detection of predominantly secondary electrons is possible due to a special detector construction.
    Trvalý link: http://hdl.handle.net/11104/0203133