Počet záznamů: 1

Nanometrology Interferometric System for Local Probe Microscopy

  1. 1.
    0368141 - UPT-D 2012 RIV DE eng C - Konferenční příspěvek (zahraniční konf.)
    Hrabina, Jan - Lazar, Josef - Číp, Ondřej - Klapetek, P.
    Nanometrology Interferometric System for Local Probe Microscopy.
    Proceedings of the 20th IMEKO TC2 Symposium on Photonics in Measurement. Aachen: Shaker Verlag, 2011, s. 17-20. ISBN 978-3-8440-0058-0.
    [IMEKO TC2 Symposium on Photonics in Measurement /20./. Linz (AT), 16.05.2011-18.05.2011]
    Grant CEP: GA MŠk(CZ) LC06007; GA AV ČR KAN311610701; GA ČR GA102/09/1276; GA ČR GPP102/11/P820
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: atomic force microscopy (AFM) * nanometrology * nanopositioning interferometry * nanoscale * iodine cells * spectroscopy
    Kód oboru RIV: BH - Optika, masery a lasery

    This work deals with the measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. We present a new design of the six-axes dimensional interferometric measurement tool for local probe microscopy stage nanopositioning with the compensation system of angle errors. The measurement tool is powered by solid-state frequency-doubled Nd:YAG laser stabilized by linear absorption spectroscopy with the help of a new type of iodine absorption cell based on borosilicate glass material.
    Trvalý link: http://hdl.handle.net/11104/0202571