Počet záznamů: 1

Multidimensional interferometric tool for the local probe microscopy nanometrology

  1. 1.
    0366031 - UPT-D 2012 RIV GB eng J - Článek v odborném periodiku
    Hrabina, Jan - Lazar, Josef - Klapetek, P. - Číp, Ondřej
    Multidimensional interferometric tool for the local probe microscopy nanometrology.
    Measurement Science and Technology. Roč. 22, č. 9 (2011), 094030:1-8 ISSN 0957-0233
    Grant CEP: GA MŠk(CZ) LC06007; GA AV ČR KAN311610701; GA ČR GA102/09/1276
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: atomic force microscopy (AFM) * nanometrology * nanopositioning interferometry * nanoscale
    Kód oboru RIV: BH - Optika, masery a lasery
    Impakt faktor: 1.494, rok: 2011

    This work reports on the measurement at the nanoscale using local probe microscopy techniques, primarily atomic force microscopy. Recent applications using the atomic force microscope as a nanometrology tool require that not only the positioning of the tip has to be based on precise measurements but also the traceability of the measuring technique has to be ensured up to the primary standard. Thus, in our experimental work, laser interferometric measuring methods were employed. In this paper, a new design of the six-axis-dimensional interferometric measurement tool for local probe microscopy stage nanopositioning is presented.
    Trvalý link: http://hdl.handle.net/11104/0201133