Počet záznamů: 1

Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering

  1. 1.
    0364652 - FZU-D 2012 RIV CH eng J - Článek v odborném periodiku
    Suchaneck, G. - Labitzke, R. - Adolphi, B. - Jastrabík, Lubomír - Adámek, Petr - Drahokoupil, Jan - Hubička, Zdeněk - Kiselev, D.A. - Kholkin, A. L. - Gerlach, G. - Dejneka, Alexandr
    Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering.
    Surface and Coatings Technology. Roč. 205, č. 2 (2011), S241-S244 ISSN 0257-8972
    Grant CEP: GA ČR GC202/09/J017; GA AV ČR KAN301370701; GA MŠk(CZ) 1M06002
    Výzkumný záměr: CEZ:AV0Z10100522
    Klíčová slova: pulsed DC reactive sputtering * RF reactive sputtering * complex oxide film deposition * polymer substrate
    Kód oboru RIV: BH - Optika, masery a lasery
    Impakt faktor: 1.867, rok: 2011

    In this work, Pb(Zr,Ti)O3 (PZT) thin films were deposited onto flexible Cu-coated Kapton® substrates by means of reactive magnetron sputtering for the first time. Different power supplies were selected for each of the 200 mm targets to adjust film composition and substrate ion bombardment. High-power pulse sputtering has been employed for the Zr-target to enhance for formation of nanocrystals, pulsed DC sputtering for the Ti-target to provide a high enough sputter yield, and RF-sputtering for the Pb-target to prevent droplet formation.Observed piezoelectric properties demonstrate that rapid-temperature-annealed films are promising for application in flexible piezoelectric sensors, actuators and power generators.
    Trvalý link: http://hdl.handle.net/11104/0200083