Počet záznamů: 1

Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH.sub.4./sub. gas

  1. 1.
    0359397 - FZU-D 2012 RIV CH eng J - Článek v odborném periodiku
    Kulykovskyy, Valeriy - Vorlíček, Vladimír - Čtvrtlík, Radim - Boháč, Petr - Suchánek, J. - Bláhová, O. - Jastrabík, Lubomír
    Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas.
    Surface and Coatings Technology. Roč. 205, č. 11 (2011), s. 3372-3376 ISSN 0257-8972
    Grant CEP: GA AV ČR KAN301370701; GA MŠk(CZ) 1M06002
    Výzkumný záměr: CEZ:AV0Z10100522
    Klíčová slova: amorphous SiC films * sputtering * hardness * coefficient of friction * Raman spectra
    Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
    Impakt faktor: 1.867, rok: 2011

    In the present work the amorphous hydrogenated silicon-carbide (a-SiC:H) films with different C/Si ratio were prepared at room temperature using DC magnetron sputtering in two ways: (i) sputtering of silicon target; (ii) sputtering of SiC target, both in the gas mixture of Ar and CH4. In the latter case the films contained less hydrogen at the same C/Si ratio. The mechanical and tribological properties of these films were studied to find their optimum combination. The hardness, elastic modulus (nanoindentation), intrinsic stress (Stoney's formula) and coefficient of friction (pin on disc tribometer) were examined in dependence on the technological parameters, film structure and composition (Raman spectra, electron probe microanalysis).
    Trvalý link: http://hdl.handle.net/11104/0197192