Počet záznamů: 1

Comparison of calculated, simulated and measured signal amplification in variable pressure SEM

  1. 1.
    0358591 - UPT-D 2012 RIV NL eng J - Článek v odborném periodiku
    Neděla, Vilém - Konvalina, Ivo - Lencová, Bohumila - Zlámal, J.
    Comparison of calculated, simulated and measured signal amplification in variable pressure SEM.
    Nuclear Instruments & Methods in Physics Research Section A. Roč. 645, č. 1 (2011), s. 79-83 ISSN 0168-9002
    Grant CEP: GA ČR GAP102/10/1410; GA MPO FR-TI1/118; GA MPO FR-TI1/305
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: electron-gas interactions * Monte Carlo simulations * signal amplification * analytical models
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
    Impakt faktor: 1.207, rok: 2011

    This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models.
    Trvalý link: http://hdl.handle.net/11104/0196577