Počet záznamů: 1
Comparison of calculated, simulated and measured signal amplification in variable pressure SEM
- 1.0358591 - ÚPT 2012 RIV NL eng J - Článek v odborném periodiku
Neděla, Vilém - Konvalina, Ivo - Lencová, Bohumila - Zlámal, J.
Comparison of calculated, simulated and measured signal amplification in variable pressure SEM.
Nuclear Instruments & Methods in Physics Research Section A. Roč. 645, č. 1 (2011), s. 79-83. ISSN 0168-9002. E-ISSN 1872-9576
Grant CEP: GA ČR GAP102/10/1410; GA MPO FR-TI1/118; GA MPO FR-TI1/305
Výzkumný záměr: CEZ:AV0Z20650511
Klíčová slova: electron-gas interactions * Monte Carlo simulations * signal amplification * analytical models
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
Impakt faktor: 1.207, rok: 2011
This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models.
Trvalý link: http://hdl.handle.net/11104/0196577
Počet záznamů: 1