Počet záznamů: 1

Detection of Secondary Electrons by Scintillation Detector in Variable Pressure Scanning Electron Microscopes

  1. 1.
    0353046 - UPT-D 2011 RIV BR eng C - Konferenční příspěvek (zahraniční konf.)
    Jirák, J. - Čudek, P. - Neděla, Vilém
    Detection of Secondary Electrons by Scintillation Detector in Variable Pressure Scanning Electron Microscopes.
    Proceedings of the 17th IFSM International Microscopy Congress. Rio de Janeiro: Sociedade Brasileira de Microscopia e Microanilise, 2010, I10.14: 1-2. ISBN 978-85-63273-06-2.
    [International Microscopy Congress (IMC17) /17./. Rio de Janeiro (BR), 19.09.2010-24.09.2010]
    Grant CEP: GA ČR GAP102/10/1410
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: VPSEM * scintillation detector
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

    Detection of signal electrons at a higher pressure in the specimen chamber of a variable pressure scanning electron microscope (VP SEM) is commonly based on ionization and scintillation types of detectors. Detection of secondary electrons by the scintillation detector requires adding a voltage up to 10 kV to the scintillator. Secondary electrons accelerated in an electric field with this voltage acquire sufficient energy to generate photons in the scintillation material. Because of problems with electric discharges originating at higher pressures of gases in the specimen chamber of VP SEM, the scintillator of the secondary electron detector has to be positioned in a special room with a pressure up to several Pa, while pressures in the specimen chamber may reach 1 000 Pa. Such detectors where the scintillator is placed in a separately evaporated room were published by Slowko and Jacka et al.
    Trvalý link: http://hdl.handle.net/11104/0192396