Počet záznamů: 1
Laser interferometric measuring system for positioning in nanometrology
0351325 - UPT-D 2011 RIV GR eng J - Článek v odborném periodiku
Lazar, Josef - Číp, Ondřej - Čížek, Martin - Hrabina, Jan - Šerý, Mojmír
Laser interferometric measuring system for positioning in nanometrology.
WSEAS Transactions on Circuits and Systems. Roč. 9, č. 10 (2010), s. 660-669 ISSN 1109-2734
Grant CEP: GA MŠk(CZ) LC06007; GA AV ČR KAN311610701; GA MPO FR-TI1/241; GA ČR GA102/09/1276
Výzkumný záměr: CEZ:AV0Z20650511
Klíčová slova: Interferometry * local probe microscopy * nanometrology * nanopositioning * traceability
Kód oboru RIV: BH - Optika, masery a lasery
In this contribution we present a development of a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The key goal for introduction of interferometer measurement is not only improvement of resolution but the direct traceability to the primary etalon of length. Interferometry compared to a host of other optical length measuring techniques [1,2,3...] represents the most precise measuring technique available. The system is being developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology.
Trvalý link: http://hdl.handle.net/11104/0191103