Počet záznamů: 1

Optical study of BST films combining ellipsometry and reflectivity

  1. 1.
    0340744 - FZU-D 2010 RIV NL eng J - Článek v odborném periodiku
    Železný, Vladimír - Chvostová, Dagmar - Pajasová, Libuše - Jelínek, Miroslav - Kocourek, Tomáš - Daniš, S. - Valvoda, V.
    Optical study of BST films combining ellipsometry and reflectivity.
    Applied Surface Science. Roč. 255, č. 10 (2009), s. 5280-5283 ISSN 0169-4332
    Výzkumný záměr: CEZ:AV0Z10100520
    Klíčová slova: BST thin films * optical properties
    Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
    Impakt faktor: 1.616, rok: 2009

    Optical properties of plasma laser-deposited Ba0.75Sr0.25TiO3 (BST) thin films have been investigated using variable angle spectroscopic ellipsometry (VASE) and near-normal spectroscopic reflectivity (NNSR) within a broad spectral range at room temperature. The samples prepared under various deposition conditions and the Si substrate coated with the structure SiO2/TiOx/Pt weremeasured. The Xray diffraction, atomic force microscopy and alpha step measurement were used for characterization of the samples. The platinum-coated Si substráte data were fitted as a semi-infinite medium using the Drude and Lorentz oscillators model. The structure model for optical characterization of the sample included not only the BST layers and substrate but also the intermix and surface roughness layers to achieve good agreement with experimental data. The substrate structure was modeled by a simple bulk with surface roughness.
    Trvalý link: http://hdl.handle.net/11104/0005780