Počet záznamů: 1

Simplified procedure for patterned growth of nanocrystalline diamond micro-structures

  1. 1.
    0337500 - FZU-D 2010 RIV CH eng J - Článek v odborném periodiku
    Kromka, Alexander - Babchenko, Oleg - Rezek, Bohuslav - Ledinský, Martin - Hruška, Karel - Potměšil, Jiří - Vaněček, Milan
    Simplified procedure for patterned growth of nanocrystalline diamond micro-structures.
    Thin Solid Films. Roč. 518, č. 1 (2009), s. 343-347 ISSN 0040-6090
    Grant CEP: GA AV ČR KAN400100701; GA AV ČR KAN400100652; GA AV ČR(CZ) IAAX00100902
    Výzkumný záměr: CEZ:AV0Z1010921
    Klíčová slova: atomic force microscopy * Raman spectroscopy * nanocrystalline diamond * selective diamond growth * seed layer * patterning
    Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
    Impakt faktor: 1.727, rok: 2009

    Two technological strategies to generate patterned diamond growth have been tested. The diamond microstructures (i.e. linear stripes and 5 μm narrow channels) were grown in the thickness of 450 nm on Si/SiO2 substrates by a microwave plasma chemical vapor deposition process. The observed results appear promising for the development of directly grown diamond-based transistors.
    Trvalý link: http://hdl.handle.net/11104/0181479