Počet záznamů: 1

Planar Heating Element Adjusted by Electron Beam Micromachining

  1. 1.
    0336802 - UPT-D 2011 RIV BG eng J - Článek v odborném periodiku
    Dupák, Libor - Dupák, Jan
    Planar Heating Element Adjusted by Electron Beam Micromachining.
    Elektrotechnica & Elektronica. Roč. 44, 5-6 (2009), s. 82-84 ISSN 0861-4717
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: electron beam machining * heating element
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

    This paper describes a planar heating element suitable for vacuum. The basis of this element is a ceramic plate with a thin layer of titanium deposited by magnetron sputtering. The copper contacts are brazed to the opposite edges of the plate for better connection of current supplies.
    Trvalý link: http://hdl.handle.net/11104/0180956