Počet záznamů: 1

Interferometric Nanoscale Comparator

  1. 1.
    0335249 - UPT-D 2010 RIV JP eng C - Konferenční příspěvek (zahraniční konf.)
    Čížek, Martin - Šmíd, Radek - Hrabina, Jan - Lazar, Josef - Číp, Ondřej
    Interferometric Nanoscale Comparator.
    MOC'09 - 15th Microoptics Conference. Tokyo: Microoptics Group (OSJ/JSAP), 2009, s. 218-219. ISBN 978-4-86348-037-7.
    [MOC'09 - Microoptics Conference /15./. Tokyo (JP), 25.10.2009-28.10.2009]
    Grant CEP: GA MŠk(CZ) LC06007; GA MŠk 2C06012; GA MPO 2A-1TP1/127; GA MPO FT-TA3/133; GA MPO 2A-3TP1/113; GA ČR GA102/09/1276; GA ČR GA102/07/1179; GA ČR GP102/09/P630; GA AV ČR KAN311610701
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: interferometric nanocomparator * laser interferometer
    Kód oboru RIV: BH - Optika, masery a lasery

    Presented paper describes a novel portable interferometric nanocomparator for calibraring displacement sensors in precision industry. Digital quadrature detector with high resolution based on a digital signal controller is used for processing the X-Y signals from the detection unit of the interferometer. Digital filtering increases signal to noise ratio and results in sub-nanometer resolution and accuracy of the laser interferometer. High dynamic range of the measuring mirror displacement is achieved using a two stage positioning system formed of a linear guide way and piezoelectric actuators.
    Trvalý link: http://hdl.handle.net/11104/0179764