Výsledky vyhledávání
- 1.0584778 - ÚPT 2024 CZ cze A - Abstrakt
Brunn, Ondřej - Knápek, Alexandr - Matějka, Milan - Krátký, Stanislav - Horáček, Miroslav - Meluzín, Petr - Chlumská, Jana - Sadílek, Jakub - Burda, Daniel - Král, Stanislav - Ondříšková, Martina - Podstránský, Jáchym - Košelová, Zuzana - Allaham, Mohammad M. - Kolařík, Vladimír
Elektronová litografie a funkční nanostruktury.
IMAPS Flash Conference. 9th International Microelectronics Assembly and Packaging Society Flash Conference. Extended abstracts. Brno: Brno University of Technology, FEEC, 2023 - (Otáhal, A.; Szendiuch, I.; Skácel, J.). s. 12-13. ISBN 978-80-214-6185-7.
[IMAPS Flash Conference 2023. International Microelectronics Assembly and Packaging Society Flash Conference /9./. 26.10.2023-27.10.2023, Brno]
Výzkumná infrastruktura: CzechNanoLab - 90110
Institucionální podpora: RVO:68081731
Obor OECD: Electrical and electronic engineering
Trvalý link: https://hdl.handle.net/11104/0352625 - 2.0514120 - ÚPT 2020 JO eng A - Abstrakt
Mousa, M. S. - Chlumská, Jana - Knápek, Alexandr
Similarities and Differences between two researches in Field Electron Emission: Way to develop more powerful electron source.
Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
[The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
Institucionální podpora: RVO:68081731
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
Trvalý link: http://hdl.handle.net/11104/0302366 - 3.0512151 - ÚPT 2020 JO eng A - Abstrakt
Matějka, Milan - Chlumská, Jana - Krátký, Stanislav - Řiháček, Tomáš - Knápek, Alexandr - Kolařík, Vladimír
Fabrication of functional nanostructures in thin silicon nitride membranes.
Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
[The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
Institucionální podpora: RVO:68081731
Klíčová slova: thin dielectric layers * silicon nitride * membranes * electron beam lithography
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
Trvalý link: http://hdl.handle.net/11104/0302363 - 4.0512149 - ÚPT 2020 JO eng A - Abstrakt
Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
Automated system for optical inspection of defects in resist coated non-patterned wafer.
Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
[The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
Grant CEP: GA MPO FV10618
Institucionální podpora: RVO:68081731
Klíčová slova: dielectric surface inspection * resist coated wafer
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
Trvalý link: http://hdl.handle.net/11104/0302361 - 5.0511777 - ÚPT 2020 eng A - Abstrakt
Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
Automated inspection of PMMA coating on non-patterned silicon wafers.
11th International Conference on Instrumental Methods of Analysis: Modern Trends and Applications, IMA-2019. Book of abstracts. -: -, 2019. s. 162.
[International Conference on Instrumental Methods of Analysis: Modern Trends and Applications /11./. 22.09.2019-25.09.2019, Ioannina]
Grant CEP: GA MPO FV10618
Institucionální podpora: RVO:68081731
Klíčová slova: dielectric surface inspection * resist coated wafer
Obor OECD: Nano-processes (applications on nano-scale)
Trvalý link: http://hdl.handle.net/11104/0302052 - 6.0429465 - ÚPT 2015 GB eng A - Abstrakt
Krátký, Stanislav - Kolařík, Vladimír - Urbánek, Michal - Matějka, Milan - Horáček, Miroslav - Chlumská, Jana - Neděla, Vilém - Jaffrezic-Renault, N. - Krejčí, J. - Kučerová, R. - Plička, R. - Krejčí, T.
Differential conductometry biosensors prepared by lift-off technique by using of e-beam writer with shaped beam.
39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. Cambridge: University of Cambridge, 2013. s. 387.
[MNE2013. International Conference on Micro and Nano Engineering /39./. 16.09.2013-19.09.2013, London]
Institucionální podpora: RVO:68081731
Klíčová slova: differential conductometry biosensor * electron-beam lithography * microorganism detection
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
Trvalý link: http://hdl.handle.net/11104/0234577 - 7.0429463 - ÚPT 2015 GB eng A - Abstrakt
Urbánek, Michal - Matějka, Milan - Kolařík, Vladimír - Horáček, Miroslav - Krátký, Stanislav - Bok, Jan - Chlumská, Jana - Mikšík, P. - Vašina, J.
Variable shape E-beam writing: proximity effect simulation and correction of binary and relief structures.
39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. Cambridge: University of Cambridge, 2013. s. 582.
[MNE2013. International Conference on Micro and Nano Engineering /39./. 16.09.2013-19.09.2013, London]
Institucionální podpora: RVO:68081731
Klíčová slova: rectangular shaped beam * proximity effect simulation * binary structures and relief structures
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
Trvalý link: http://hdl.handle.net/11104/0234576