Vytisknout
0486980 - FZÚ 2018 RIV US eng J - Článek v odborném periodiku
Čada, Martin - Lundin, D. - Hubička, Zdeněk
Measurement and modeling of plasma parameters in reactive high-power impulse magnetron sputtering of Ti in Ar/O2 mixtures.
Journal of Applied Physics. Roč. 121, č. 17 (2017), s. 1-7, č. článku 171913. ISSN 0021-8979. E-ISSN 1089-7550
Grant CEP: GA ČR(CZ) GA15-00863S
GRANT EU: European Commission(XE) 608800 - HIPPOCAMP
Institucionální podpora: RVO:68378271
Klíčová slova: reactive sputtering * HiPIMS * Langmuir probe * R-IRM model * plasma density * electron temperature
Obor OECD: Fluids and plasma physics (including surface physics)
Impakt faktor: 2.176, rok: 2017
Trvalý link: http://hdl.handle.net/11104/0281686
Čada, Martin - Lundin, D. - Hubička, Zdeněk
Measurement and modeling of plasma parameters in reactive high-power impulse magnetron sputtering of Ti in Ar/O2 mixtures.
Journal of Applied Physics. Roč. 121, č. 17 (2017), s. 1-7, č. článku 171913. ISSN 0021-8979. E-ISSN 1089-7550
Grant CEP: GA ČR(CZ) GA15-00863S
GRANT EU: European Commission(XE) 608800 - HIPPOCAMP
Institucionální podpora: RVO:68378271
Klíčová slova: reactive sputtering * HiPIMS * Langmuir probe * R-IRM model * plasma density * electron temperature
Obor OECD: Fluids and plasma physics (including surface physics)
Impakt faktor: 2.176, rok: 2017
Trvalý link: http://hdl.handle.net/11104/0281686