Košík

0464208 - FZÚ 2017 RIV DE eng A - Abstrakt
Čada, Martin - Lundin, D. - Hubička, Zdeněk
Direct measurements of the ion flux at the substrate in reactive HiPIMS.
International Conference on Plasma Surface Engineering. Abstracts. ( PSE 2016 ) /15./. Braunschweig: European Joint Committee on Plasma and Ion Surface Engineering (EJC / PISE), 2016. s. 415-415.
[International Conference on Plasma Surface Engineering ( PSE 2016 ). 12.09.2016-16.09.2016, Garmisch-Partenkirchen]
Grant CEP: GA ČR(CZ) GA15-00863S; GA TA ČR TA03010743
GRANT EU: European Commission(XE) 608800 - HIPPOCAMP
Institucionální podpora: RVO:68378271
Klíčová slova: HiPIMS * impedance * ion flux * reactive sputtering
Kód oboru RIV: BL - Fyzika plazmatu a výboje v plynech
Trvalý link: http://hdl.handle.net/11104/0263191