Košík

0431332 - ÚPT 2015 CZ eng A - Abstrakt
Kolařík, Vladimír - Krátký, Stanislav - Urbánek, Michal
PEC reliability in 3D e-beam DOE nanopatterning.
9th International Conference on Charged Particle Optics. Book of Abstracts. Brno: Institute of Scientific Instruments AS CR, v. v. i, 2014. s. 37. ISBN 978-80-87441-11-4.
[International Conference on Charged Parrticle Optics /9./. 31.08.2014-05.09.2014, Brno]
Grant CEP: GA MŠMT(CZ) LO1212; GA TA ČR TE01020233
Institucionální podpora: RVO:68081731
Klíčová slova: proximity effect correction * diffractive optical elements
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
Trvalý link: http://hdl.handle.net/11104/0236392