Košík

0567159 - FZÚ 2023 RIV CH eng J - Článek v odborném periodiku
Schulze, Ch. - Li, H. - Mohn, L. - Müller, Martin - Benedikt, J.
Chamber with inverted electrode geometry for measuring and control of ion flux-energy distribution functions.
Plasma. Roč. 5, č. 3 (2022), s. 295-305. E-ISSN 2571-6182
Výzkumná infrastruktura: CzechNanoLab - 90110
Institucionální podpora: RVO:68378271
Klíčová slova: capacitively coupled plasma * inductively coupled plasma * rf bias * ion energy distribution * energy-selective mass spectrometry
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)
Způsob publikování: Open access
Trvalý link: https://hdl.handle.net/11104/0338436