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Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method
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SYSNO ASEP 0579923 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method Tvůrce(i) Tang, X. (DE)
Chappa, G. K. (DE)
Viera, L. (CZ)
Holeňa, Martin (UIVT-O) SAI, RID
Dropka, N. (DE)Zdroj.dok. Crystals. - : MDPI - ISSN 2073-4352
Roč. 13, č. 12 (2023), s. 1659Poč.str. 16 s. Forma vydání Online - E Jazyk dok. eng - angličtina Země vyd. CH - Švýcarsko Klíč. slova LEC growth ; gallium arsenide ; CFD ; regression tree Obor OECD Computer sciences, information science, bioinformathics (hardware development to be 2.2, social aspect to be 5.8) Způsob publikování Open access Institucionální podpora UIVT-O - RVO:67985807 UT WOS 001130951800001 EID SCOPUS 85180658215 DOI 10.3390/cryst13121659 Anotace In this study, an axisymmetric Czochralski furnace model for the LEC growth of gallium arsenide is presented. We produced 88 datasets through computational fluid dynamics simulations. Among the many parameters that affect crystal growth, a total of 13 input parameters were selected, including the geometry and material parameters of the hot zone (crucible, heaters, radiation shield, and crystal), as well as the process parameters (such as pulling and rotation rates, heating power, etc.). Voronkov criteria (v/Gn), interface deflection, and the average interface temperature gradient were selected as the output parameters. We carried out a correlation analysis between the variables and used decision trees to study the impact of the 13 input variables on the output variables. The results indicated that in the growth of gallium arsenide, the main factor affecting interface deflection and the average interface thermal gradients is the crucible rotation rate. For v/Gn, it is the pulling rate. Pracoviště Ústav informatiky Kontakt Tereza Šírová, sirova@cs.cas.cz, Tel.: 266 053 800 Rok sběru 2024 Elektronická adresa https://doi.org/10.3390/cryst13121659
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