Počet záznamů: 1  

Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level

  1. 1.
    SYSNO ASEP0555695
    Druh ASEPJ - Článek v odborném periodiku
    Zařazení RIVJ - Článek v odborném periodiku
    Poddruh JČlánek ve WOS
    NázevTraceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level
    Tvůrce(i) Arezki, Y. (FR)
    Su, R. (GB)
    Heikkinen, V. (FI)
    Leprete, F. (FR)
    Psota, Pavel (UFP-V) RID, ORCID
    Bitou, Y. (JP)
    Schober, C. (DE)
    Mehdi-Souzani, C. (FR)
    Alzahrani, B. A. M. (SA)
    Zhang, X. (CN)
    Kondo, Y. (JP)
    Prüss, J. (DE)
    Lédl, Vít (UFP-V) RID
    Anwer, N. (FR)
    Bouazizi, M. L. (SA)
    Leach, R. (GB)
    Nouira, H. (FR)
    Celkový počet autorů17
    Číslo článku1103
    Zdroj.dok.Sensors. - : MDPI
    Roč. 21, č. 4 (2021), s. 1-19
    Poč.str.17 s.
    Jazyk dok.eng - angličtina
    Země vyd.CH - Švýcarsko
    Klíč. slovaAspheric and freeform optical elements ; Dimensional metrology ; Measured data evaluation ; Robust reference minimum zone (Hybrid Trust Region) fitting ; Ultra-high precision measuring machine ; Uncertainty
    Vědní obor RIVBH - Optika, masery a lasery
    Obor OECDOptics (including laser optics and quantum optics)
    Způsob publikováníOpen access
    Institucionální podporaUFP-V - RVO:61389021
    UT WOS000624696400001
    EID SCOPUS85100456319
    DOI10.3390/s21041103
    AnotaceThe design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.
    PracovištěÚstav fyziky plazmatu
    KontaktVladimíra Kebza, kebza@ipp.cas.cz, Tel.: 266 052 975
    Rok sběru2022
    Elektronická adresahttps://www.mdpi.com/1424-8220/21/4/1103
Počet záznamů: 1  

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