Počet záznamů: 1  

Development and Optimization of VGF-GaAs Crystal Growth Process Using Data Mining and Machine Learning Techniques

  1. 1.
    SYSNO ASEP0547633
    Druh ASEPJ - Článek v odborném periodiku
    Zařazení RIVJ - Článek v odborném periodiku
    Poddruh JČlánek ve WOS
    NázevDevelopment and Optimization of VGF-GaAs Crystal Growth Process Using Data Mining and Machine Learning Techniques
    Tvůrce(i) Dropka, N. (DE)
    Böttcher, K. (DE)
    Holeňa, Martin (UIVT-O) SAI, RID
    Celkový počet autorů3
    Číslo článku1218
    Zdroj.dok.Crystals. - : MDPI - ISSN 2073-4352
    Roč. 11, č. 10 (2021)
    Poč.str.20 s.
    Jazyk dok.eng - angličtina
    Země vyd.CH - Švýcarsko
    Klíč. slovaVGF-GaAs growth ; machine learning ; data mining ; decision trees ; correlation analysis ; PCA biplot ; k-means clustering
    Vědní obor RIVIN - Informatika
    Obor OECDComputer sciences, information science, bioinformathics (hardware development to be 2.2, social aspect to be 5.8)
    CEPGA18-18080S GA ČR - Grantová agentura ČR
    Způsob publikováníOpen access
    Institucionální podporaUIVT-O - RVO:67985807
    UT WOS000717001300001
    EID SCOPUS85117286796
    DOI10.3390/cryst11101218
    AnotaceThe aim of this study was to assess the ability of the various data mining and supervised machine learning techniques: correlation analysis, k-means clustering, principal component analysis and decision trees (regression and classification), to derive, optimize and understand the factors influencing VGF-GaAs growth. Training data were generated by Computational Fluid Dynamics (CFD) simulations and consisted of 130 datasets with 6 inputs (growth rate and power of 5 heaters) and 5 outputs (interface position and deflection, and temperatures at various positions in GaAs). Data mining results confirmed a good dispersion of the training data without the feasibility of a dimensionality reduction. Data clustering was observed in relation to the position of the crystallization front relative to the side heaters. Based on the statistical performance criteria and training results, decision trees identified the most decisive inputs and their ranges for a favorable interface shape and to keep GaAs temperature beyond limits for heavy arsenic evaporation. Decision trees are a recommendable machine learning technique with short training times and acceptable predictive accuracy based on small volume of CFD training data, capable of providing guidelines for understanding the crystal growth process, which is a prerequisite for the growth of low-cost, high-quality bulk crystals.
    PracovištěÚstav informatiky
    KontaktTereza Šírová, sirova@cs.cas.cz, Tel.: 266 053 800
    Rok sběru2022
    Elektronická adresahttp://dx.doi.org/10.3390/cryst11101218
Počet záznamů: 1  

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