Počet záznamů: 1
Compact differential plane interferometer with in-axis mirror tilt detection
- 1.
SYSNO ASEP 0543086 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Compact differential plane interferometer with in-axis mirror tilt detection Tvůrce(i) Řeřucha, Šimon (UPT-D) RID, ORCID, SAI
Holá, Miroslava (UPT-D) RID, ORCID, SAI
Šarbort, Martin (UPT-D) RID, ORCID, SAI
Hrabina, Jan (UPT-D) RID, ORCID, SAI
Oulehla, Jindřich (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCID
Lazar, Josef (UPT-D) RID, ORCID, SAICelkový počet autorů 7 Číslo článku 106568 Zdroj.dok. Optics and Lasers in Engineering. - : Elsevier - ISSN 0143-8166
Roč. 141, June (2021)Poč.str. 8 s. Forma vydání Tištěná - P Jazyk dok. eng - angličtina Země vyd. NL - Nizozemsko Klíč. slova Laser interferometry ; Optical metrology ; Dimensional measurement ; Common path interferometer ; Differential interferometer ; Tilt compensation Vědní obor RIV BH - Optika, masery a lasery Obor OECD Optics (including laser optics and quantum optics) CEP FV10336 GA MPO - Ministerstvo průmyslu a obchodu TE01020233 GA TA ČR - Technologická agentura ČR TN01000008 GA TA ČR - Technologická agentura ČR ED0017/01/01 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy LO1212 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy EF16_026/0008460 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy Způsob publikování Open access Institucionální podpora UPT-D - RVO:68081731 UT WOS 000640984000014 EID SCOPUS 85100770198 DOI 10.1016/j.optlaseng.2021.106568 Anotace Besides the environmental fluctuations, the typical sources of significant uncertainty in the laser interferometry systems are the geometrical errors. These are stemming, among others, from the misalignment of measurement axes, the thermo-mechanical influences of the system components and the mounting, guidance errors of the translation mechanism that carries the measurement mirror or vibrations. We report on a compact double-pass differential plane interferometer that features an original optical arrangement with four parallel and coplanar beams, where the beam pairs in the two arms are coaxial. The differential arrangement minimizes the dead path and shortens the metrological loop so that the sensitivity to thermal drifts and vibrations is reduced. The arm symmetry allows for the preservation of the Abbe principle, and the common path mitigates the influences of the environmental disturbances. The interferometer optics is designed as a self-contained single-piece assembly made using optical contacting from the low-expansion materials. The interferometer system integrates the homodyne receiver (even though the optical arrangement is well-suited for heterodyne detection too) and also a tilt-detection electronics that allows for detection of pitch and roll of the interferometer mirror so that the parasitic movement of the measuring mirror could be compensated for. The experimental characterization revealed a good optical performance of the interferometer with sub-nanometre cyclic error and the resolution of tilt detection in order of a few microradians. Pracoviště Ústav přístrojové techniky Kontakt Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Rok sběru 2022 Elektronická adresa https://www.sciencedirect.com/science/article/pii/S0143816621000385
Počet záznamů: 1