Počet záznamů: 1

The influence of Au-nanoparticles presence in PDMS on microstructures creation by ion beam lithography

SYSNO ASEP	0525371
Druh ASEP	J - Článek v odborném periodiku
Zařazení RIV	J - Článek v odborném periodiku
Poddruh J	Článek ve WOS
Název	The influence of Au-nanoparticles presence in PDMS on microstructures creation by ion beam lithography
Tvůrce(i)	Romanenko, Oleksandr V. (UJF-V)_{ORCID, SAI} Slepička, P. (CZ) Malinský, Petr (UJF-V)_{RID, ORCID, SAI} Cutroneo, Mariapompea (UJF-V)_{ORCID, RID, SAI} Havránek, Vladimír (UJF-V)_{RID, SAI, ORCID} Stammers, James H. (UJF-V) Švorčík, V. (CZ) Macková, Anna (UJF-V)_{RID, ORCID, SAI}
Celkový počet autorů	8
Zdroj.dok.	Surface and Interface Analysis. - : Wiley - ISSN 0142-2421 Roč. 52, č. 12 (2020), s. 1040-1044
Poč.str.	5 s.
Forma vydání	Tištěná - P
Jazyk dok.	eng - angličtina
Země vyd.	US - Spojené státy americké
Klíč. slova	gold nanoparticles ; ion beam lithography ; microstructure ; PDMS ; shrinkage
Vědní obor RIV	BG - Jaderná, atomová a mol. fyzika, urychlovače
Obor OECD	Nano-materials (production and properties)
CEP	GA19-02482S GA ČR - Grantová agentura ČR
	LM2015056 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy
	EF16_013/0001812 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy
Způsob publikování	Omezený přístup
Institucionální podpora	UJF-V - RVO:61389005
UT WOS	000537352400001
EID SCOPUS	85085892917
DOI	10.1002/sia.6821
Anotace	3D microstructures in pure poly(dimethylsiloxane) (PDMS) and PDMS with embedded Au nanoparticles were prepared by ion beam lithography without any further etching. Two mega-electron volts helium and 10 MeV oxygen ions were used for ion microstructuring. Parallel lines of 1 mm in length and 10 mu m in thickness were fabricated for investigation of the effect of the nanoparticles presence in the polymer on the surface morphology of the created microstructures. The created microstructures were checked by optical microscope. Infrared (IR) spectrometry was used to study the effect of the ions type and fluence on the chemical changes of the material. Atomic force microscopy was used for the fine detail study as well as for checking the microstructure quality. Analysis revealed an increased radiation resistance of the nanocomposite compared to the pure PDMS. Shrinkage is proportional to the fluence, but the maximum value for both materials is limited by saturation. 3D microstructure in modified PDMS obtained at the same irradiation condition as pure PDMS is characterized by its smaller height. Obtaining the microstructure in nanocomposite of the same height as in pure PDMS by increasing the fluence can be impossible due to saturation of shrinkage and/or radiation-induced heating of the material.
Pracoviště	Ústav jaderné fyziky
Kontakt	Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228
Rok sběru	2021
Elektronická adresa	https://doi.org/10.1002/sia.6821

Počet záznamů: 1