Počet záznamů: 1
In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM
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SYSNO ASEP 0508751 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM Tvůrce(i) Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Mika, Filip (UPT-D) RID, SAI, ORCID
Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Materna Mikmeková, Eliška (UPT-D) ORCID, RID, SAI
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDCelkový počet autorů 5 Číslo článku 2307 Zdroj.dok. Materials. - : MDPI
Roč. 12, č. 14 (2019)Poč.str. 13 s. Forma vydání Tištěná - P Jazyk dok. eng - angličtina Země vyd. CH - Švýcarsko Klíč. slova band-pass filter of signal electrons ; SE detection ; trajectory simulations Vědní obor RIV JA - Elektronika a optoelektronika, elektrotechnika Obor OECD Electrical and electronic engineering CEP TE01020118 GA TA ČR - Technologická agentura ČR TE01020233 GA TA ČR - Technologická agentura ČR TN01000008 GA TA ČR - Technologická agentura ČR Způsob publikování Open access Institucionální podpora UPT-D - RVO:68081731 UT WOS 000480454300095 EID SCOPUS 85070449469 DOI 10.3390/ma12142307 Anotace Scanning electron microscopes come equipped with different types of detectors for the collection of signal electrons emitted from samples. In-lens detection systems mostly consist of several auxiliary electrodes that help electrons to travel in a direction towards the detector. This paper aims to show that a through-the-lens detector in a commercial electron microscope Magellan 400 FEG can, under specific conditions, work as an energy band-pass filter of secondary electrons that are excited by the primary beam electrons. The band-pass filter properties verify extensive simulations of secondary and backscattered electrons in a precision 3D model of a microscope. A unique test sample demonstrates the effects of the band-pass filter on final image and contrast with chromium and silver stripes on a silicon substrate, manufactured by a combination of e-beam lithography, wet etching, and lift-off technique. The ray tracing of signal electrons in a detector model predicate that the through-the-lens detector works as a band-pass filter of the secondary electrons with an energy window of about 3 eV. By moving the energy window along the secondary electron energy spectrum curve of the analyzed material, we select the energy of the secondary electrons to be detected. Energy filtration brings a change in contrast in the image as well as displaying details that are not otherwise visible. Pracoviště Ústav přístrojové techniky Kontakt Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Rok sběru 2020 Elektronická adresa https://www.mdpi.com/1996-1944/12/14/2307/htm
Počet záznamů: 1