Počet záznamů: 1

In situ XPS study of vacuum annealed diamond and DLC thin films

SYSNO ASEP	0502226
Druh ASEP	A - Abstrakt
Zařazení RIV	Záznam nebyl označen do RIV
Zařazení RIV	Není vybrán druh dokumentu
Název	In situ XPS study of vacuum annealed diamond and DLC thin films
Tvůrce(i)	Artemenko, Anna (FZU-D)_{RID, ORCID} Marton, M. (SK) Romanyuk, Olexandr (FZU-D)_{RID, ORCID} Dragounová, Kateřina (FZU-D)_ORCID Kromka, Alexander (FZU-D)_{RID, ORCID, SAI}
Celkový počet autorů	5
Zdroj.dok.	17th Joint Vacuum Conference - Book of abstracts. - Praha, 2018 / Mašek K. ; Jungwirthová I. ; Drbohlav J. S. 140-141
Poč.str.	2 s.
Forma vydání	Online - E
Akce	Joint Vacuum Conference /17./
Datum konání	10.09.2018 - 14.09.2018
Místo konání	Olomouc
Země	CZ - Česká republika
Typ akce	WRD
Jazyk dok.	eng - angličtina
Země vyd.	CZ - Česká republika
Klíč. slova	NCD ; DLC ; in situ ; vacuum
Vědní obor RIV	BM - Fyzika pevných látek a magnetismus
Obor OECD	Condensed matter physics (including formerly solid state physics, supercond.)
CEP	GBP108/12/G108 GA ČR - Grantová agentura ČR
Institucionální podpora	FZU-D - RVO:68378271
Anotace	Nanocrystalline diamond (NCD) and diamond-like carbon (DLC) films were proved to have unique surface properties useful for various applications, which are subjected to significant heating under operational conditions. In the present study, the thermal stability of H- or O-terminated NCD and DLC film surfaces were investigated. The as grown NCD and DLC surfaces were modified by RF plasma in appropriate gas mixtures. The H/O-NCD and DLC films were annealed up to 800°C in vacuum and analyzed in situ by XPS and ex situ by SEM and Raman spectroscopy. SEM and Raman measurements confirmed stability of annealed H/O-NCD samples. XPS analysis showed that oxygen concentration is reduced significantly (from 8 to 4 at.%) at 300°C and dropped almost to zero at 800 °C on O-NCD films. The O-DLC films have lost the oxygen slowly (from 13 to 6 at.% at 300°C). The vacuum annealing above 550°C resulted in both H- and O-DLC film delamination. This work was supported by the project GACR P108/12/G108.
Pracoviště	Fyzikální ústav
Kontakt	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Rok sběru	2019

Počet záznamů: 1