Počet záznamů: 1
Influence of reactive oxygen species during deposition of iron oxide films by high power impulse magnetron sputtering
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SYSNO ASEP 0489691 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Influence of reactive oxygen species during deposition of iron oxide films by high power impulse magnetron sputtering Tvůrce(i) Straňák, V. (CZ)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Čada, Martin (FZU-D) RID, ORCID, SAI
Bogdanowicz, R. (PL)
Wulff, H. (DE)
Helm, C.A. (DE)
Hippler, R. (DE)Celkový počet autorů 7 Číslo článku 095205 Zdroj.dok. Journal of Physics D-Applied Physics. - : Institute of Physics Publishing - ISSN 0022-3727
Roč. 51, č. 9 (2018), s. 1-12Poč.str. 12 s. Jazyk dok. eng - angličtina Země vyd. GB - Velká Británie Klíč. slova high power impulse magnetron sputtering (HiPIMS) ; iron oxide thin films ; wüstite ; magnetite ; maghemite ; hematite Vědní obor RIV BL - Fyzika plazmatu a výboje v plynech Obor OECD Fluids and plasma physics (including surface physics) CEP GA17-08389S GA ČR - Grantová agentura ČR Institucionální podpora FZU-D - RVO:68378271 UT WOS 000425119300001 EID SCOPUS 85042390741 DOI 10.1088/1361-6463/aaa9e6 Anotace Iron oxide films were deposited using high power impulse magnetron sputtering (HiPIMS) of an iron cathode in an argon/oxygen gas mixture at different gas pressures (0.5 Pa, 1.5 Pa, and 5.0 Pa). The HiPIMS system was operated at a repetition frequency f = 100 Hz with a duty cycle of 1%. A main goal is a comparison of film growth during conventional and electron cyclotron wave resonance-assisted HiPIMS. The deposition plasma was investigated by means of optical emission spectroscopy and energy-resolved mass spectrometry. Active oxygen species were detected and their kinetic energy was found to depend on the gas pressure. Deposited films were characterized by means of spectroscopic ellipsometry and grazing incidence x-ray diffraction. Optical properties and crystallinity of as-deposited films were found to depend on the deposition conditions. Deposition of hematite iron oxide films with the HiPIMS-ECWR discharge is attributed to the enhanced production of reactive oxygen species. Pracoviště Fyzikální ústav Kontakt Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Rok sběru 2019
Počet záznamů: 1