Počet záznamů: 1
STEM modes in SEM – simulations and experiments
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SYSNO ASEP 0481585 Druh ASEP C - Konferenční příspěvek (mezinárodní konf.) Zařazení RIV D - Článek ve sborníku Název STEM modes in SEM – simulations and experiments Tvůrce(i) Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Paták, Aleš (UPT-D) RID, ORCID, SAI
Mika, Filip (UPT-D) RID, SAI, ORCID
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDCelkový počet autorů 4 Zdroj.dok. 13th Multinational Congress on Microscopy: Book of Abstracts. - Zagreb : Ruder Bošković Institute, Croatian Microscopy Society, 2017 / Gajović A. ; Weber I. ; Kovačević G. ; Čadež V. ; Šegota S. ; Peharec Štefanić P. ; Vidoš A. - ISBN 978-953-7941-19-2 Rozsah stran s. 140-141 Poč.str. 2 s. Forma vydání Tištěná - P Akce Multinational Congress on Microscopy /13./ Datum konání 24.09.2017 - 29.09.2017 Místo konání Rovinj Země HR - Chorvatsko Typ akce WRD Jazyk dok. eng - angličtina Země vyd. HR - Chorvatsko Klíč. slova STEM detector ; trajectory simulations ; cathode lens ; collection efficiency Vědní obor RIV JA - Elektronika a optoelektronika, elektrotechnika Obor OECD Electrical and electronic engineering CEP TE01020118 GA TA ČR - Technologická agentura ČR Institucionální podpora UPT-D - RVO:68081731 Anotace The semiconductor STEM detector in the Magellan 400 FEG SEM microscope (www.fei.com) is used to detect transmitted electrons (TE) and allows observing samples in four imaging modes. Two modes of objective lens, namely HR (high resolution) and UHR (ultra high resolution), differ by their resolution and by the presence or absence of a magnetic field around the sample. If the deceleration mode is chosen, cathode lens (CL) field is added, and two further microscope modes can be obtained. The aim of this work is to study the trajectories of the TEs in each mode with regard to their angular and energy distribution. The HR and HR + CL mode is without magnetic field around the sample, for that reason the electrons retain their angular information. In addition, the electrostatic field between the sample and the STEM detector collimates the electrons towards the optical axis. We can detect TEs emitted at a large polar angles with respect to the optical axis. On the other hand, for UHR and UHR + CL modes, the sample is placed in a strong magnetic field. The electrons under the influence of the magnetic field have spiral trajectories and can cross the optical axis plane several times during their path to the detector, thus angular information is not simply interpretable. Pracoviště Ústav přístrojové techniky Kontakt Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Rok sběru 2018
Počet záznamů: 1