Počet záznamů: 1
Study of the coherence of the primary beam in the low energy scanning electron microscope
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SYSNO ASEP 0448612 Druh ASEP C - Konferenční příspěvek (mezinárodní konf.) Zařazení RIV Záznam nebyl označen do RIV Název Study of the coherence of the primary beam in the low energy scanning electron microscope Tvůrce(i) Řiháček, Tomáš (UPT-D) RID, ORCID
Mika, Filip (UPT-D) RID, SAI, ORCID
Matějka, Milan (UPT-D) RID, ORCID, SAI
Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDCelkový počet autorů 5 Zdroj.dok. MC 2015. Microscopy Conference Proceedings. - Göttingen : DGE, 2015 Rozsah stran s. 611-612 Poč.str. 2 s. Forma vydání Online - E Akce Microscopy Conference 2015 Datum konání 06.09.2015-11.09.2015 Místo konání Göttingen Země DE - Německo Typ akce WRD Jazyk dok. eng - angličtina Země vyd. DE - Německo Klíč. slova scanning electron microscope ; coherence of the primary beam Vědní obor RIV JA - Elektronika a optoelektronika, elektrotechnika CEP TE01020118 GA TA ČR - Technologická agentura ČR Institucionální podpora UPT-D - RVO:68081731 Anotace Coherence of an electron beam is an important characteristic in a transmission electron microscope (TEM). It can be measured simply by analyzing the interference fringes in a diffraction pattern. On the other hand, the coherence of the beam is usually not important for standard applications of a scanning electron microscope (SEM). Nevertheless it can be of importance for some specific cases. The aim of this experiment is to find out whether the coherence of our SEM beam is high enough to enable us to perform a diffraction experiment at low energies (E = 350 - 2000 eV) which would enable us to create an electron vortex beam with of tens of keV. Some complications with the visualization of a diffraction pattern arise because SEM does not allow observing the pattern directly because of the scanning of the electron beam. Therefore the usual TEM diffraction techniques cannot be used. One way to get the resulting intensity profile is proposed in. We therefore make use of an experimental setup similar to that used in which is depicted in Figure 1. Our experiment was adapted for the SEM microscope FEI Magellan 400. The grating is carried by the retractable mechanism of a CBS detector which is placed below the pole piece of the objective lens where the diffraction of the primary beam takes place while the beam itself is focused to the specimen plane. The imaging of a diffraction pattern is achieved by scanning the beam across a specimen which consists of a contrasting vertical stripe on a dark background. For this purpose we have chosen a golden stripe on a carbon substrate. Secondary electrons are then collected with the standard side Everhart-Thornley (ET) detector. Pracoviště Ústav přístrojové techniky Kontakt Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Rok sběru 2016
Počet záznamů: 1