Počet záznamů: 1
Nanodiamond
- 1.
SYSNO ASEP 0432021 Druh ASEP M - Kapitola v monografii Zařazení RIV C - Kapitola v knize Název Low temperature diamond growth Tvůrce(i) Ižák, Tibor (FZU-D) RID
Babchenko, Oleg (FZU-D) RID, ORCID
Potocký, Štěpán (FZU-D) RID, ORCID
Remeš, Zdeněk (FZU-D) RID, ORCID
Kozak, Halyna (FZU-D) RID, ORCID
Verveniotis, Elisseos (FZU-D) RID
Rezek, Bohuslav (FZU-D) RID, ORCID
Kromka, Alexander (FZU-D) RID, ORCID, SAIZdroj.dok. Nanodiamond. - Cambridge : The Royal Society of Chemistry, 2014 / Williams O.A. - ISBN 978-1-84973-639-8 Rozsah stran s. 290-342 Poč.str. 53 s. Poč.str.knihy 530 Forma vydání Tištěná - P Jazyk dok. eng - angličtina Země vyd. GB - Velká Británie Klíč. slova diamond film ; pulsed linear antenna MWCVD ; low temperature deposition ; temperature sensitive substrates Vědní obor RIV BM - Fyzika pevných látek a magnetismus CEP GBP108/12/G108 GA ČR - Grantová agentura ČR Institucionální podpora FZU-D - RVO:68378271 DOI 10.1039/9781849737616-00290 Anotace The present chapter focuses on the low temperature diamond growth from technological and practical point of view. The LTDG process is divided in two strategies based i) on the modification of the deposition systems and ii) on the change of gas chemistry. State of the art of each strategy and involved fundamental growth processes are reviewed. Among the discussed diamond growth processes, microwave surface wave plasma in linear antenna configuration with oxygen containing gas mixture is shown as the most promising process for the LTDG over large areas with high optical and electronic grade material. The growth phenomena observed in the linear antenna microwave plasma provide a simple way to control nano- and poly-crystalline diamond character. A practical comparison between focused and linear antenna microwave plasma is presented on several key studies which utilize the LTDG on amorphous silicon, glass, germanium and optical elements used for IR spectroscopy. Pracoviště Fyzikální ústav Kontakt Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Rok sběru 2015
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