Počet záznamů: 1  

On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C: H coatings with DC magnetron sputtering at low or high ion flux

  1. 1.
    SYSNO ASEP0431164
    Druh ASEPJ - Článek v odborném periodiku
    Zařazení RIVJ - Článek v odborném periodiku
    Poddruh JČlánek ve WOS
    NázevOn the control of deposition process for enhanced mechanical properties of nc-TiC/a-C: H coatings with DC magnetron sputtering at low or high ion flux
    Tvůrce(i) Souček, P. (CZ)
    Schmidtová, T. (CZ)
    Zábranský, L. (CZ)
    Buršíková, V. (CZ)
    Vašina, P. (CZ)
    Caha, O. (CZ)
    Buršík, Jiří (UFM-A) RID
    Peřina, Vratislav (UJF-V) RID
    Mikšová, Romana (UJF-V) RID
    Pei, Y. (NL)
    de Hosson, J. T. M. (NL)
    Celkový počet autorů11
    Zdroj.dok.Surface and Coatings Technology. - : Elsevier - ISSN 0257-8972
    Roč. 255, 25 September (2014), s. 8-14
    Poč.str.7 s.
    Jazyk dok.eng - angličtina
    Země vyd.CH - Švýcarsko
    Klíč. slovaenhanced mechanical properties ; ion flux on the substrate ; magnetron sputtering
    Vědní obor RIVBL - Fyzika plazmatu a výboje v plynech
    Institucionální podporaUFM-A - RVO:68081723 ; UJF-V - RVO:61389005
    UT WOS000343348800003
    DOI10.1016/j.surfcoat.2013.11.001
    AnotaceAbstract Nanocomposite coatings consisting of nanocrystallites embedded in an amorphous matrix can be tailored to exhibit unusual combination of properties such as high hardness and modulus combined with low friction and wear. The properties of the coatings are governed by parameters of the deposition plasma, which are a nontrivial function of the deposition process parameters. Energy flux onto the growing films provided by ionized species is one of the key parameters influencing the properties of coatings. This study is focused on the influence of ion flux on the properties of the growing nc-TiC/a-C:H thin film in order to achieve enhanced mechanical properties. Two different magnetic field configurations were used. The saturated ion current on the substrate was found to be seven times higher in the strongly unbalanced magnetic configuration as compared to well-balanced configuration. The deposition temperature was constant at ~. 320. °C, which is higher than the usual temperature for similar depositions of nc-TiC/a-C(:H) coatings. The structure and mechanical properties of the coatings prepared at low or high ion flux were studied and compared.
    PracovištěÚstav fyziky materiálu
    KontaktYvonna Šrámková, sramkova@ipm.cz, Tel.: 532 290 485
    Rok sběru2015