Počet záznamů: 1  

Differential conductometry biosensors prepared by lift-off technique by using of e-beam writer with shaped beam

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    SYSNO ASEP0429465
    Druh ASEPA - Abstrakt
    Zařazení RIVZáznam nebyl označen do RIV
    Zařazení RIVNení vybrán druh dokumentu
    NázevDifferential conductometry biosensors prepared by lift-off technique by using of e-beam writer with shaped beam
    Tvůrce(i) Krátký, Stanislav (UPT-D) RID, ORCID, SAI
    Kolařík, Vladimír (UPT-D) RID, ORCID, SAI
    Urbánek, Michal (UPT-D) RID
    Matějka, Milan (UPT-D) RID, ORCID, SAI
    Horáček, Miroslav (UPT-D) RID, ORCID, SAI
    Chlumská, Jana (UPT-D) RID, ORCID, SAI
    Neděla, Vilém (UPT-D) RID, ORCID, SAI
    Jaffrezic-Renault, N. (FR)
    Krejčí, J. (CZ)
    Kučerová, R. (CZ)
    Plička, R. (CZ)
    Krejčí, T. (CZ)
    Celkový počet autorů12
    Zdroj.dok.39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. - Cambridge : University of Cambridge, 2013
    S. 387
    Poč.str.1 s.
    Forma vydáníTištěná - P
    AkceMNE2013. International Conference on Micro and Nano Engineering /39./
    Datum konání16.09.2013-19.09.2013
    Místo konáníLondon
    ZeměGB - Velká Británie
    Typ akceWRD
    Jazyk dok.eng - angličtina
    Země vyd.GB - Velká Británie
    Klíč. slovadifferential conductometry biosensor ; electron-beam lithography ; microorganism detection
    Vědní obor RIVJA - Elektronika a optoelektronika, elektrotechnika
    Institucionální podporaUPT-D - RVO:68081731
    AnotaceThis contribution deals with a manufacturing of differential conductometry biosensors. The active area of the sensors is made of large-area interdigitated array (IDA) gold electrodes. The IDA is prepared by e-beam writer with shaped beam. DNA sensors and microorganism detection requires appropriately designed structures with characteristic dimension up to hundreds of nm. The main goal of this contribution focuses on the IDA fabrication using electron beam lithography and additional technologies. Besides the main technology process, testing of the sensors, packaging and differential conductometry analysis is included. E-beam writer BS600 with shaped beam was used to generate desired pattern of IDA. IDA area wasThis contribution deals with a manufacturing of differential conductometry biosensors. The active area of the sensors is made of large-area interdigitated array (IDA) gold electrodes. The IDA is prepared by e-beam writer with shaped beam. DNA sensors and microorganism detection requires appropriately designed structures with characteristic dimension up to hundreds of nm. The main goal of this contribution focuses on the IDA fabrication using electron beam lithography and additional technologies. Besides the main technology process, testing of the sensors, packaging and differential conductometry analysis is included.
    PracovištěÚstav přístrojové techniky
    KontaktMartina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
    Rok sběru2015
Počet záznamů: 1