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Differential conductometry biosensors prepared by lift-off technique by using of e-beam writer with shaped beam
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SYSNO ASEP 0429465 Druh ASEP A - Abstrakt Zařazení RIV Záznam nebyl označen do RIV Zařazení RIV Není vybrán druh dokumentu Název Differential conductometry biosensors prepared by lift-off technique by using of e-beam writer with shaped beam Tvůrce(i) Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Kolařík, Vladimír (UPT-D) RID, ORCID, SAI
Urbánek, Michal (UPT-D) RID
Matějka, Milan (UPT-D) RID, ORCID, SAI
Horáček, Miroslav (UPT-D) RID, ORCID, SAI
Chlumská, Jana (UPT-D) RID, ORCID, SAI
Neděla, Vilém (UPT-D) RID, ORCID, SAI
Jaffrezic-Renault, N. (FR)
Krejčí, J. (CZ)
Kučerová, R. (CZ)
Plička, R. (CZ)
Krejčí, T. (CZ)Celkový počet autorů 12 Zdroj.dok. 39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. - Cambridge : University of Cambridge, 2013
S. 387Poč.str. 1 s. Forma vydání Tištěná - P Akce MNE2013. International Conference on Micro and Nano Engineering /39./ Datum konání 16.09.2013-19.09.2013 Místo konání London Země GB - Velká Británie Typ akce WRD Jazyk dok. eng - angličtina Země vyd. GB - Velká Británie Klíč. slova differential conductometry biosensor ; electron-beam lithography ; microorganism detection Vědní obor RIV JA - Elektronika a optoelektronika, elektrotechnika Institucionální podpora UPT-D - RVO:68081731 Anotace This contribution deals with a manufacturing of differential conductometry biosensors. The active area of the sensors is made of large-area interdigitated array (IDA) gold electrodes. The IDA is prepared by e-beam writer with shaped beam. DNA sensors and microorganism detection requires appropriately designed structures with characteristic dimension up to hundreds of nm. The main goal of this contribution focuses on the IDA fabrication using electron beam lithography and additional technologies. Besides the main technology process, testing of the sensors, packaging and differential conductometry analysis is included. E-beam writer BS600 with shaped beam was used to generate desired pattern of IDA. IDA area wasThis contribution deals with a manufacturing of differential conductometry biosensors. The active area of the sensors is made of large-area interdigitated array (IDA) gold electrodes. The IDA is prepared by e-beam writer with shaped beam. DNA sensors and microorganism detection requires appropriately designed structures with characteristic dimension up to hundreds of nm. The main goal of this contribution focuses on the IDA fabrication using electron beam lithography and additional technologies. Besides the main technology process, testing of the sensors, packaging and differential conductometry analysis is included. Pracoviště Ústav přístrojové techniky Kontakt Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Rok sběru 2015
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