Počet záznamů: 1
Optical study of defects in nanodiamond films grown in linear antenna microwave plasma CVD from H.sub.2./sub./CH.sub.4./sub./CO.sub.2./sub. gas mixture
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SYSNO ASEP 0388439 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Optical study of defects in nanodiamond films grown in linear antenna microwave plasma CVD from H2/CH4/CO2 gas mixture Tvůrce(i) Varga, Marián (FZU-D) RID, ORCID
Remeš, Zdeněk (FZU-D) RID, ORCID
Babchenko, Oleg (FZU-D) RID, ORCID
Kromka, Alexander (FZU-D) RID, ORCID, SAIZdroj.dok. Physica Status Solidi B : Basic Solid State Physics. - : Wiley - ISSN 0370-1972
Roč. 249, č. 12 (2012), s. 2635-2639Poč.str. 5 s. Jazyk dok. eng - angličtina Země vyd. DE - Německo Klíč. slova nanocrystalline diamond ; optical spectroscopy ; wide band gap semiconductors ; pulsed linear plasma CVD Vědní obor RIV BM - Fyzika pevných látek a magnetismus CEP GAP108/11/0794 GA ČR - Grantová agentura ČR GAP205/12/0908 GA ČR - Grantová agentura ČR LH12236 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy CEZ AV0Z10100521 - FZU-D (2005-2011) UT WOS 000312215300079 DOI 10.1002/pssb.201200154 Anotace We present the study on optical quality of nanocrystalline diamond (NCD) films with submicron grain size grown from H2/CH4/CO2 gas mixture on alkali-free borosilicate glass substrates using the commercially available large area linear antenna pulsed microwave plasma chemical vapor deposition (CVD) system. The NCD films were characterized by Raman spectroscopy, atomic force microscopy, and scanning electron microscopy. The NCD layers are optically transparent and show low optical scattering. The defect states measured by photo-thermal deflection spectroscopy (PDS) and dual beam photocurrent spectroscopy (DBPS) are dominated by the non-diamond carbon phases localized at grain boundaries with the characteristic shape of the optical absorption spectrum and the photo-ionization threshold in a near infrared region. The sp2-related defect density increases for samples grown at higher pressure. From DBPS we estimate the concentration of substitutional nitrogen to be below 10 ppm. The optimized NCD layers show the photoionization threshold in UV region above 5 eV and a broad exponential tail below 5 eV. Pracoviště Fyzikální ústav Kontakt Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Rok sběru 2013
Počet záznamů: 1