Počet záznamů: 1
Optimized Plasma Enhanced Chemical Vapor Deposition from HMDSO/O2 for Surface Protection of Metals
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SYSNO ASEP 0368401 Druh ASEP A - Abstrakt Zařazení RIV Záznam nebyl označen do RIV Zařazení RIV Není vybrán druh dokumentu Název Optimized Plasma Enhanced Chemical Vapor Deposition from HMDSO/O2 for Surface Protection of Metals Překlad názvu Optimized Plasma Enhanced Chemical Vapor Deposition from HMDSO/O2 for Surface Protection of Metals Tvůrce(i) Muresan, M. (CZ)
Zajíčková, L. (CZ)
Pekařík, V. (CZ)
Buršíková, V. (CZ)
Ondráček, P.
Campbellová, A.
Peřina, Vratislav (UJF-V) RID
Mikšová, Romana (UJF-V) RID, ORCID, SAICelkový počet autorů 8 Zdroj.dok. , 2011 Poč.str. 1 s. Akce NANOCON 2011. International Conference /3./ Datum konání 21.09.2011-23.09.2011 Místo konání Brno Země CZ - Česká republika Typ akce WRD Jazyk dok. eng - angličtina Klíč. slova SiO2 ; Aluminium ; Steel ; PECVD Vědní obor RIV BL - Fyzika plazmatu a výboje v plynech CEZ AV0Z10190503 - MU-W (2005-2011) Anotace The coatings were obtained from mixtures of hexamethyldisiloxane (HMDSO) with oxygen using a radio frequency capacitively coupled glow discharge at 13.56 MHz. Deposition of SiO2-like films from 8% HMDSO/O2 were found to have low internal stress, high fracture toughness and high hardness. Different pressures were used in order to obtain the best properties of the films. These dual purpose films can be used as a transparent protective coatings for aluminum substrates or a intermediate layer for harder coatings with good adhesion on stainless steel. The films were optically characterized by spectroscopic ellipsometry and reflectometry. Complete atomic composition was determined by ion beam analysis (RBS/ERDA). Infrared spectroscopy was used for the chemical bonds assessment. Hardness, elastic modulus and scratch test were performed. Surface energy measurements indicated hydrophilic character of the coatings, an important factor for industrial applications. Překlad anotace The coatings were obtained from mixtures of hexamethyldisiloxane (HMDSO) with oxygen using a radio frequency capacitively coupled glow discharge at 13.56 MHz. Deposition of SiO2-like films from 8% HMDSO/O2 were found to have low internal stress, high fracture toughness and high hardness. Different pressures were used in order to obtain the best properties of the films. These dual purpose films can be used as a transparent protective coatings for aluminum substrates or a intermediate layer for harder coatings with good adhesion on stainless steel. The films were optically characterized by spectroscopic ellipsometry and reflectometry. Complete atomic composition was determined by ion beam analysis (RBS/ERDA). Infrared spectroscopy was used for the chemical bonds assessment. Hardness, elastic modulus and scratch test were performed. Surface energy measurements indicated hydrophilic character of the coatings, an important factor for industrial applications. Pracoviště Ústav jaderné fyziky Kontakt Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Rok sběru 2012
Počet záznamů: 1