Počet záznamů: 1
Novel high frequency pulsed MW-linear antenna plasma-chemistry: Routes towards large area, low pressure nanodiamond growth
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SYSNO ASEP 0361471 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Novel high frequency pulsed MW-linear antenna plasma-chemistry: Routes towards large area, low pressure nanodiamond growth Tvůrce(i) Taylor, Andrew (FZU-D) RID, ORCID
Fendrych, František (FZU-D) RID, ORCID, SAI
Fekete, Ladislav (FZU-D) RID, ORCID
Vlček, J. (CZ)
Řezáčová, V. (CZ)
Petrák, V. (CZ)
Krucký, J. (CZ)
Nesladek, M. (BE)
Liehr, M. (DE)Zdroj.dok. Diamond and Related Materials. - : Elsevier - ISSN 0925-9635
Roč. 20, č. 4 (2011), s. 613-615Poč.str. 3 s. Jazyk dok. eng - angličtina Země vyd. CH - Švýcarsko Klíč. slova nanodiamond ; high frequency ; microwave plasma enhanced CVD ; OES ; Raman Vědní obor RIV BM - Fyzika pevných látek a magnetismus CEP KAN200100801 GA AV ČR - Akademie věd KAN400480701 GA AV ČR - Akademie věd LD11076 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy CEZ AV0Z10100520 - FZU-D (2005-2011) UT WOS 000291140200032 DOI 10.1016/j.diamond.2011.01.003 Anotace Current experimental microwave plasma enhanced chemical vapour deposition (MW PECVD) concepts for diamond thin films do not allow scaling up toward large areas, which is essential for microelectronic industries. Also, current growth temperatures are rather high and not compatible with processing technologies. In the current work we demonstrate a breakthrough concept using a high frequency (HF) pulsed MW-linear antenna plasma configuration, allowing a scalable concept. By using HF pulses non-linear MW absorption conditions are reached, allowing a reduction of input power to 4 W/cm2 compared with typically 100-200 W/cm2 for resonance cavity applicators. Despite the factor of 50 power reduction, the growth rate obtained at 450°C is comparable to or higher than that of resonance cavity systems. Our concept is a significant improvement as compared to [1 & 3] previous methods of nanodiamond growth. The resulting diamond films show columnar growth, i.e. resembling classical NCD. Pracoviště Fyzikální ústav Kontakt Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Rok sběru 2012
Počet záznamů: 1