Počet záznamů: 1
Time-resolved diagnostics of dual high power impulse magnetron sputtering with pulse delays of 15 μs and 500 μs
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SYSNO ASEP 0359582 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Time-resolved diagnostics of dual high power impulse magnetron sputtering with pulse delays of 15 μs and 500 μs Tvůrce(i) Straňák, V. (DE)
Drache, S. (DE)
Čada, Martin (FZU-D) RID, ORCID, SAI
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Tichý, M. (CZ)
Hippler, R. (DE)Zdroj.dok. Contributions to Plasma Physics. - : Wiley - ISSN 0863-1042
Roč. 51, 2-3 (2011), s. 237-245Poč.str. 9 s. Jazyk dok. eng - angličtina Země vyd. DE - Německo Klíč. slova time-resolved plasma diagnostics ; optical emission spectroscopy ; Langmuir probe ; magnetron sputtering Vědní obor RIV BH - Optika, masery a lasery CEP KAN301370701 GA AV ČR - Akademie věd GP202/09/P159 GA ČR - Grantová agentura ČR KJB100100805 GA AV ČR - Akademie věd 1M06002 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy GA202/09/0800 GA ČR - Grantová agentura ČR CEZ AV0Z10100522 - FZU-D (2005-2011) UT WOS 000288610800020 DOI 10.1002/ctpp.201000065 Anotace Time-resolved measurements have been performed during dual High Power Impulse Magnetron Sputtering (dual-HiPIMS) with two cathodes in a closed magnetic field configuration. The effect of a delay between subsequent pulses on electron density, mean electron energy, and ion flux to the substrate was investigated by time-resolved diagnostic methods. Two different delays of 15 μs and 500 μs between subsequent pulses were investigated. The dual-HiPIMS system, operated at a repetition frequency f = 100 Hz and duty cycle of 1 %, was equipped with different metallic targets (Ti, Cu). It is shown that a delay between subsequent pulses influences the plasma parameters and can be used to control deposition processes. It was noted that target surfaces (alternately serving as a cathode/anode) are contaminated by sputtered material from the previous pulse which influences the time-evolution of the discharge parameters. Pracoviště Fyzikální ústav Kontakt Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Rok sběru 2012
Počet záznamů: 1