Počet záznamů: 1

Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model

SYSNO ASEP	0350874
Druh ASEP	J - Článek v odborném periodiku
Zařazení RIV	J - Článek v odborném periodiku
Poddruh J	Článek ve WOS
Název	Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model
Tvůrce(i)	Navrátil, Z. (CZ) Dvořák, P. (CZ) Brzobohatý, Oto (UPT-D)_{RID, ORCID, SAI} Trunec, D. (CZ)
Celkový počet autorů	4
Zdroj.dok.	Journal of Physics D-Applied Physics. - : Institute of Physics Publishing - ISSN 0022-3727 Roč. 43, Nov 3 (2010), 505203:1-11
Poč.str.	11 s.
Jazyk dok.	eng - angličtina
Země vyd.	GB - Velká Británie
Klíč. slova	electron temperature ; electron density ; optical emission spectroscopy ; collisional–radiative model
Vědní obor RIV	BL - Fyzika plazmatu a výboje v plynech
CEP	GA202/07/1669 GA ČR - Grantová agentura ČR
CEZ	AV0Z20650511 - UPT-D (2005-2011)
UT WOS	000284942800007
DOI	10.1088/0022-3727/43/50/505203
Anotace	A method of determination of electron temperature and electron density in plasmas based on optical emission spectroscopy complemented with collisional–radiative modelling (OES/CRM) was studied in this work. A radiofrequency (13.56 MHz) capacitively coupled discharge in neon at 10 Pa was investigated by intensity calibrated optical emission spectroscopy. The absolute intensities of neon transitions between 3p and 3s states were fitted with a collisional–radiative (CR) model in order to determine the electron temperature and electron density. Measuring techniques such as imaging with an ICCD camera were adopted for supplementary diagnostics. The obtained results were compared with the results of compensated Langmuir probe measurement and one-dimensional article-in-cell/Monte Carlo (PIC/MC) simulation.
Pracoviště	Ústav přístrojové techniky
Kontakt	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Rok sběru	2011

Počet záznamů: 1