Počet záznamů: 1
Imaging of specimens at optimized low and very low energies in scanning electron microscopy
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SYSNO ASEP 0205544 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Ostatní články Název Imaging of specimens at optimized low and very low energies in scanning electron microscopy Tvůrce(i) Müllerová, Ilona (UPT-D) RID, SAI, ORCID Zdroj.dok. Scanning Microscopy - ISSN 0891-7035
Roč. 13, č. 1 (1999), s. 7 - 22Poč.str. 16 s. Jazyk dok. eng - angličtina Země vyd. US - Spojené státy americké Klíč. slova contrast mechanisms ; scanning electron microscope ; low electron energies Vědní obor RIV JA - Elektronika a optoelektronika, elektrotechnika CEP IAA2065502 GA AV ČR - Akademie věd GA202/95/0280 GA ČR - Grantová agentura ČR GA202/96/0961 GA ČR - Grantová agentura ČR CEZ AV0Z2065902 - UPT-D Anotace A modern trend toward low electron energies in scanning electron microscopy (SEM), characterised by lowering the acceleration voltages in low voltage SEM (LVSEM) or by utilising a retarding-field optical element in low energy SEM (LESEM), makes the energy range where new contrasts appear accessible. This range is further extended by a cathode-lens equipped scanning low energy electron microscope (SLEEM) which achieves nearly constant spatial resolution throughout the energy scale. This enables one to optimise freely the electron beam energy according to the ask. At low energies, classes of image contrast exist that make visitable particular specimen data most effectively or even exclusively within certain energy intervals or at certain energy values only. Some contrasts are well understood and can already be utilised for practical surface examinations but others are not yet reliably explained and complementary experiments are needed. Pracoviště Ústav přístrojové techniky Kontakt Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Rok sběru 2003
Počet záznamů: 1